PK40X High Purity Pressure Sensor for Semiconductor & UHP Gas Systems

The PK40X series is an ultra-high purity (UHP) pressure sensor meticulously engineered with an all-metal welded structure to thrive in semiconductor, photovoltaic, and flat panel display manufacturing environments. Featuring 100% Electropolished (EP) liquid-contact surfaces and manufactured in a Class 100 cleanroom, this transducer ensures complete isolation and zero contamination across toxic, corrosive, and flammable special gas pipelines. Covering a versatile pressure envelope from -14.7 up to 5000 psi, the PK40X serves as a critical, high-reliability component for critical ultra-pure gas distribution systems and gas cabinets。

 

• Ultra-Pure 316L VIM/VAR Construction: Engineered with premium SUS316L, 316L VIM/VAR, or Nickel-based alloy diaphragms combined with 100% EP (Electropolished) treatment and oil-free degreasing to prevent particle generation and chemical corrosion.

• Strict SEMI E49.6 Standard Compliance: Produced, 100% cleaned, and dual-layer vacuum-packed inside a rigorous Class 100 cleanroom environment to comply fully with global SEMI standards for advanced wafer fabrication.

• Zero-Leakage Hermetic Security: Subjected to 100% leak testing to guarantee a helium leak rate≤ 1 × 10⁻¹⁰kPa. I/s,

• completely eliminating the catastrophic risk of hazardous, flammable, or toxic media overflow.

• High-Accuracy Dynamic Monitoring: Delivers exceptional accuracy up to ±0.1%FS BFSL; with an overpressure capability up to 4x maximum range, providing severe-service stability ($\pm0.1\% \text{ FS/Year}$) in gas delivery systems.

 

Technical parameter

Type	Gauge, Absolute, Negative Pressure
Measurement Range	-14.7…0…5000psi
Accuracy Grade (@25℃)	≥160psi: ±0.1%FS BFSL;           <160psi: ±0.15%FS BFSL
Maximum Measurement Deviation (@25℃)	±0.25%FS
Overpressure	Up to 4 times maximum
Medium Temperature	-20…85°C
Ambient Temperature	-40…125°C
Average Temperature Coefficient (-20~85℃)	Zero point: <0.1%FS/10K;    Span: <0.1%FS/10K
Supply Voltage	DC24V (10…30V DC)
Output Signal	4…20mA, 0…5V, 0…10V, 1..5V
Connection Material	SUS316L/316L VIM/VAR
Diaphragm Material	SUS316L/316L VIM/VAR/V Nickel-based alloy
Stability Performance	Typical value: 0.1%FS/Year
Leak Rate	≤ 1 × 10⁻¹⁰kPa. I/s
Packaging	Vacuum double-layer packaging, compliant with SEMI E49.6

 

Specification

 

 

 

Electrical connection