{"id":589,"date":"2024-10-23T15:32:28","date_gmt":"2024-10-23T07:32:28","guid":{"rendered":"https:\/\/dabeysensor.com\/?post_type=product&#038;p=589"},"modified":"2026-05-31T10:00:33","modified_gmt":"2026-05-31T02:00:33","slug":"pk40x-high-purity-pressure-sensor-semiconductor","status":"publish","type":"product","link":"https:\/\/www.dabeysensor.com\/?product=pk40x-high-purity-pressure-sensor-semiconductor","title":{"rendered":"PK40X High purity pressure sensor"},"content":{"rendered":"<h2>PK40X High Purity Pressure Sensor for Semiconductor &amp; UHP Gas Systems<\/h2>\n<p>The PK40X series is an ultra-high purity (UHP) pressure sensor meticulously engineered with an all-metal welded structure to thrive in <a href=\"http:\/\/APPLICATION\">semiconductor<\/a>, photovoltaic, and flat panel display manufacturing environments. Featuring 100% Electropolished (EP) liquid-contact surfaces and manufactured in a Class 100 cleanroom, this transducer ensures complete isolation and zero contamination across toxic, corrosive, and flammable special gas pipelines. Covering a versatile pressure envelope from -14.7 up to 5000 psi, the PK40X serves as a critical, high-reliability component for critical ultra-pure gas distribution systems and gas cabinets\u3002<\/p>\n<p>&nbsp;<\/p>\n<ul>\n<li>\n<p data-path-to-node=\"21,0,0\"><b data-path-to-node=\"21,0,0\" data-index-in-node=\"0\">Ultra-Pure 316L VIM\/VAR Construction:<\/b> Engineered with premium SUS316L, 316L VIM\/VAR, or Nickel-based alloy diaphragms combined with <b data-path-to-node=\"21,0,0\" data-index-in-node=\"132\">100% EP (Electropolished) treatment<\/b> and oil-free degreasing to prevent particle generation and chemical corrosion.<\/p>\n<\/li>\n<li>\n<p data-path-to-node=\"21,1,0\"><b data-path-to-node=\"21,1,0\" data-index-in-node=\"0\">Strict SEMI E49.6 Standard Compliance:<\/b> Produced, 100% cleaned, and dual-layer vacuum-packed inside a rigorous <b data-path-to-node=\"21,1,0\" data-index-in-node=\"110\">Class 100 cleanroom environment<\/b> to comply fully with global SEMI standards for advanced wafer fabrication.<\/p>\n<\/li>\n<li>\n<p data-path-to-node=\"21,2,0\"><b data-path-to-node=\"21,2,0\" data-index-in-node=\"0\">Zero-Leakage Hermetic Security:<\/b> Subjected to 100% leak testing to guarantee a helium leak rate\u2264 <strong>1 \u00d7 10\u207b\u00b9\u2070kPa. I\/s,<\/strong><\/p>\n<\/li>\n<li>\n<p data-path-to-node=\"21,2,0\">completely eliminating the catastrophic risk of hazardous, flammable, or toxic media overflow.<\/p>\n<\/li>\n<li>\n<p data-path-to-node=\"21,3,0\"><b data-path-to-node=\"21,3,0\" data-index-in-node=\"0\">High-Accuracy Dynamic Monitoring:<\/b> Delivers exceptional accuracy up to <strong>\u00b10.1%FS BFSL<\/strong>;\u00a0with an overpressure capability up to 4x maximum range, providing severe-service stability (<span class=\"math-inline\" data-math=\"\\pm0.1\\% \\text{ FS\/Year}\" data-index-in-node=\"187\">$\\pm0.1\\% \\text{ FS\/Year}$<\/span>) in gas delivery systems.<\/p>\n<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<h3><strong>Technical parameter<\/strong><\/h3>\n<table width=\"689\">\n<tbody>\n<tr>\n<td width=\"205\">Type<\/td>\n<td width=\"484\">Gauge, Absolute, Negative Pressure<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Measurement Range<\/td>\n<td width=\"484\">\u00a0-14.7&#8230;0&#8230;5000psi<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Accuracy Grade (@25\u2103)<\/td>\n<td>\u2265160psi: \u00b10.1%FS BFSL;\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 &lt;160psi: \u00b10.15%FS BFSL<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Maximum Measurement Deviation (@25\u2103)<\/td>\n<td width=\"484\">\u00a0\u00b10.25%FS<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Overpressure<\/td>\n<td width=\"484\">\u00a0Up to 4 times maximum<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Medium Temperature<\/td>\n<td width=\"484\">\u00a0-20&#8230;85\u00b0C<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Ambient Temperature<\/td>\n<td width=\"484\">\u00a0-40&#8230;125\u00b0C<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Average Temperature Coefficient (-20~85\u2103)<\/td>\n<td width=\"484\">\u00a0Zero point: &lt;0.1%FS\/10K;\u00a0\u00a0\u00a0 Span: &lt;0.1%FS\/10K<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Supply Voltage<\/td>\n<td width=\"484\">\u00a0DC24V (10&#8230;30V DC)<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Output Signal<\/td>\n<td width=\"484\">\u00a04&#8230;20mA, 0&#8230;5V, 0&#8230;10V, 1..5V<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Connection Material<\/td>\n<td width=\"484\">\u00a0SUS316L\/316L VIM\/VAR<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Diaphragm Material<\/td>\n<td width=\"484\">\u00a0SUS316L\/316L VIM\/VAR\/V Nickel-based alloy<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Stability Performance<\/td>\n<td width=\"484\">Typical value: 0.1%FS\/Year<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Leak Rate<\/td>\n<td>\u2264 1 \u00d7 10\u207b\u00b9\u2070kPa. I\/s<\/td>\n<\/tr>\n<tr>\n<td width=\"205\">Packaging<\/td>\n<td width=\"484\">Vacuum double-layer packaging, compliant with SEMI E49.6<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>&nbsp;<\/p>\n<p><strong>Specification<\/strong><\/p>\n<p><img fetchpriority=\"high\" decoding=\"async\" class=\"wp-image-592 aligncenter\" src=\"https:\/\/dabeysensor.com\/wp-content\/uploads\/2024\/10\/\u56fe\u72471-119x300.png\" alt=\"\" width=\"202\" height=\"510\" \/><\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p><strong>Electrical connection<\/strong><\/p>\n<p><img decoding=\"async\" class=\"wp-image-605 aligncenter\" src=\"https:\/\/dabeysensor.com\/wp-content\/uploads\/2024\/10\/\u5fae\u4fe1\u56fe\u7247_20241025143835-300x156.png\" alt=\"\" width=\"655\" height=\"341\" \/><\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<ul>\n<li>Seal: Special pressure process connection with semiconductor<\/li>\n<li>Test: 100% helium leak test<\/li>\n<li>Packing: Vacuum packing in clean room<\/li>\n<li>Surface treatment: EP level Ra\u22640.13\u00b5m at the process connection<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p><strong>Application<\/strong><\/p>\n<ul>\n<li>Photovoltaic semiconductor<\/li>\n<li>High purity\/ultra-pure application environment<\/li>\n<li>Corrosive liquid gas environment<\/li>\n<li>Valve system<\/li>\n<\/ul>\n","protected":false},"featured_media":590,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_angie_page":false,"om_disable_all_campaigns":false,"_uag_custom_page_level_css":""},"product_brand":[],"product_cat":[25],"product_tag":[],"class_list":["post-589","product","type-product","status-publish","has-post-thumbnail","product_cat-pressure-sensor","first","instock","shipping-taxable","product-type-simple"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.9 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>PK40X High Purity Pressure Sensor | SEMI Compliant Transducer | Dabey Sensor<\/title>\n<meta name=\"description\" content=\"PK40X ultra-high purity pressure sensor for semiconductor gases. -14.7 to 5000psi, 316L VIM\/VAR, leak rate \u22641x10\u207b\u00b9\u2070 kPa.l\/s. 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